SPIE Advanced Lithography Exhibition 2015

Date
2015-02-22 - 2015-02-26
Organizer
Exhibitors
50
Floor Size
0
Attendees
2300
Event contact title
SPIE sales
Event contact first name
Teresa
Event contact last name
Roles-Meier
Email
teresar@spie.org
Event contact telephone number
+1 360 685 5445
Fax
+1 360 647 1445
Description

SPIE Advanced Lithography Exhibition, the industry's most important event for lithography R&D, devices, tools, fabrication, and services.

 

SPIE Advanced Lithography is structured into seven conferences:

* Alternative Lithographic Technologies
* Extreme Ultraviolet Lithography
* Metrology, Inspection, and Process Control for Microlithography
* Advances in Patterning Materials and Processing Technology
* Optical Microlithography
* Design-Process-Technology Co-Optimization for Manufacturability
* Advanced Etch Technology for Nanopatterning

All conferences are organized by current practitioners of the art, and numerous courses are taught by recognized industry experts.

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